Capillary force actuator device and related method of applications

ABSTRACT

An actuator capable of generates force by leveraging the changes in capillary pressure and surface tension that result from the application of an electrical potential. The device, which will be referred to as a Capillary Force Actuator (CFA), and related methods, employs a conducting liquid bridge between two (or more) surfaces, at least one of which contains dielectric-covered electrodes, and operates according to the principles of electro wetting on dielectric.

RELATED APPLICATIONS

The present application is a national stage filing of InternationalApplication No. PCT/US2007/013366, Jun. 6, 2007, which claims benefit ofpriority under 35 U.S.C. §119(e) from U.S. Provisional Application Ser.No. 60/811,169 filed Jun. 6, 2006, entitled “Method and System forCapillary Force Actuators,” of which the disclosure hereby incorporatedby reference herein in entirety.

FIELD OF THE INVENTION

The present invention relates to the field of actuators used to createforce or pressure in systems like micro-electromechanical systems(MEMS). More specifically, the present invention relates to an actuatorthat is driven by induced changes in the capillary pressure of a liquidthrough the application of an electrical potential.

BACKGROUND OF THE INVENTION

For micro-electromechanical systems (MEMS) and bio-MEMS (e.g., micrototal analysis systems, or μTAS), a variety of force actuation methodshave been used to either move structures or to induce stress instationary structures, including electromagnetic, electrostatic,pneumatic, thermal, piezoelectric, magnetostrictive, among others. Eachof these actuation technologies has advantages, disadvantages, andtrade-offs in terms of performance metrics such as force capability,total displacement (stroke), actuation bandwidth, ease of integration toparticular applications, and manufacturability.

Electrostatic actuation is the most commonly employed technology incommercial applications that require actuation forces produced withinthe lateral plane of the lithographically fabricated device, though someare employed to tilt objects about a pivot in some applications, notablymirrors in Texas Instruments' Digital Light Processor chip [TI 2006].Conventional electrostatic actuators rely on the property that a virtualdisplacement of one electrode towards another generates a decrease inoverall energy. The energy change is achieved through a decrease in thethickness of the dielectric (air). One problem with this type ofactuator is that the actuation stroke depends on the thickness of thedielectric (the air gap) while actuation force is dependent on itinversely. Thus, large forces and large strokes cannot be simultaneouslyachieved.

In MEMS electrostatic actuators, a decoupling of actuator stroke fromdielectric thickness has been achieved by using a comb arrangement asdisclosed in inventions like Rodgers, et al., U.S. Pat. No. 6,133,670,hereby incorporated by reference. In comb actuators, an air gap servesas the dielectric and its thickness is the gap between comb teeth(typically 1 micron or greater). But this arrangement suffers fromlimitations of its own. As the force produced by electrostatic combactuators is increased by decreasing comb teeth spacing or increasingthe length of the teeth, the device becomes prone to side instability(i.e., instability perpendicular to comb teeth and desired stroke). Inaddition, practical limits of lithography also limit the teeth spacingand hence, force capability.

The actuators in Wapner & Hoffman, U.S. Pat No. 6,152,181, herebyincorporated by reference, rely on changes in the shape and position ofliquid droplets in response to external stimuli to operate pumps, valvesand other mechanical devices like sensors. These devices take advantageof changes in surface tension and capillary pressure to actuate. Theyrely on the principle of electrowetting which refers to the change inwetting behavior of a liquid when an electric potential is applied[Shapiro, 2003].

Other actuation methods in the prior art illustrate that the wettingeffect can be enhanced by the use of a dielectric layer, see [Moon 2002,Shapiro 2003] as a reference. Electrowetting has been investigated forthe movement of fluid droplets in μTAS [Pollack 2002] or integratedcircuit cooling systems, for altering the shape of a liquid lens orliquid mirror, and in optical devices [Jackel 1983]. In theseapplications, electrowetting is employed for the translational motion ofa fluid drop across a surface, or for the distortion of drop shape so asto affect the drop's optical properties. In droplet transport, animbalance in surface tension forces induces droplet motion; motion isnot caused by a change in capillary pressure. A number of patents onthese applications exist. Electrowetting has also been used to move asolid mirror floating on top a liquid metal drop by distorting thedrop's shape via increased wetting of the drop on a flat supportingsubstrate; the mirror in this case moves normal to the supportingsubstrate [Wan 2006]. With the application of voltage, the mirror movesto a new equilibrium position where the total force exerted by the dropupon the mirror is unchanged from the value achieved with no appliedvoltage. (In equilibrium, the drop force must equal the gravitationalforce acting upon the mirror which is unchanged.)

A main problem with the prior art uses of electrowetting for actuationis, but not limited thereto, that it is of limited application.Specifically, it is limited to applications that rely only on the changein shape or the change in position of the liquid. These systems dependon gravity (in the case of the floating mirror) or the physicalstructure of the surrounding system, in the case of sensors and valves,to enable actuation after the liquid responds to the applied potential.

The prior art fails to provide a means to produce and sustainsignificant force or pressure with continuous applied voltage.Furthermore, capillary pressures achieved in the prior art are, bynecessity, greater than ambient pressure. The prior art fails toleverage the fact that at small scale (for example, less than 1millimeter), the forces of capillary pressure and surface tension can bevery large, making this actuation scheme particularly appealing formicro-electromechanical systems (MEMs) and bio-MEMS, as well as forlarger mesoscale (for example, approximately 1 mm) devices. By combiningtogether many such small capillary force actuators, powerful meso- andmacroscale actuators can, in principle, also be developed.

There is a need to provide an actuator that is capable of optimizing thevarious performance metrics of actuators for improved performance inexisting systems and for the facilitation of new actuation-based systemscurrently unavailable due to the limitations in the prior art. Notably,there is a need for actuators that provide increased force capabilitiesat reduced voltage levels. There is also a need for out-of-plane forcesin relation to the substrate in lab-on-a-chip, and other MEMS (i.e.force creation in a direction other than parallel to the surface)without sacrificing stability, force capability, or actuator stroke, andfor greater stability and wear-resistance in actuators that arecurrently employed in mechanical systems.

SUMMARY OF THE INVENTION

An aspect of various embodiments of the present invention device andmethods, which will be referred to as a Capillary Force Actuator (CFA),employs a conducting liquid bridge between two (or more) surfaces, atleast one of which contains dielectric-covered electrodes. An electricalpotential is applied across the electrodes. The capillary force actingupon the surfaces is modified by the applied potential. The forceproduced by the electrical potential acts in addition to any surfacetension or (perhaps repulsive) capillary forces produced by the liquidbridge in absence of the electrical potential. This design enables theforce creation of a traditional electrostatic actuator to bedramatically increased by the forces enabled byelectrowetting-on-dielectric. An aspect of the various embodiments ofthe present invention provides, among other things, a new means to applyforces to stationary structures, to flexible elements such as membranes,to flexibly-supported elements, or to freestanding bodies.

An aspect of an embodiment of the present invention provides a capillaryforce-actuator. The capillary force-actuator comprising: a firstsubstrate; an electrode layer disposed on the first substrate; adielectric layer disposed on the electrode layer on the side farthestfrom the first substrate; and a conducting liquid in communication withthe dielectric layer. And whereby the capillary pressure within theliquid is reduced by the application of an electric potential and isbelow ambient pressure with the application of sufficient electricalpotential thereby exerting a pulling force on the first substrate whenthe actuator is in communication with a surface of a system.

An aspect of an embodiment of the present invention provides a capillaryforce-actuator. The capillary force-actuator comprising: a firstsubstrate; an electrode layer disposed on the first substrate; adielectric layer disposed on the electrode layer on the side farthestfrom the first substrate; a second substrate; and a conducting liquid incommunication with the dielectric layer of the first substrate and thesecond substrate. And whereby the capillary pressure within the liquidis reduced by the application of an electric potential and is belowambient pressure with the application of sufficient electrical potentialthereby exerting a pulling force on the first and second substrates.

An aspect of an embodiment of the present invention provides a method offorce actuating. The method comprising: providing a the first substrate;providing an electrode layer disposed on the first substrate; providinga dielectric layer disposed on the electrode layer on the side farthestfrom the first substrate; providing a conducting liquid in communicationwith the dielectric layer of the first substrate; integrating the firstsubstrate and the conducting liquid into a system, wherein theconducting liquid is in communication with the surface of the system,and applying an electric potential to reduce the capillary pressurewithin the conducting liquid with the application of sufficientelectrical potential that exerts a pulling force on the first substratethereby reducing the distance between the first substrate and thesurface of the system.

An aspect of an embodiment of the present invention provides a method offorce actuating. The method comprising: providing a the first substrate;providing an electrode layer disposed on the first substrate; providinga dielectric layer disposed on the electrode layer on the side farthestfrom the first substrate; providing a the second substrate; providing aconducting liquid in communication with the dielectric layer of thefirst substrate and the second substrate; and applying an electricpotential to reduce the capillary pressure within the conducting liquidwith the application of sufficient electrical potential that exerts apulling force on the first and second substrates thereby reducing thedistance between the first substrate and the second substrate to provideactuation.

An aspect of an embodiment of the present invention provides a method ofcapillary actuating. The method comprising: providing a the firstsubstrate; providing an electrode layer disposed on the first substrate;providing a dielectric layer disposed on the electrode layer on the sidefarthest from the first substrate; providing a the second substrate;providing an electrode layer disposed on the second substrate; providinga dielectric layer disposed on the electrode layer on the side farthestfrom the second substrate; providing a conducting liquid incommunication with the dielectric layer of the first substrate and thedielectric layer of the second substrate; and applying an electricpotential to reduce the capillary pressure within the conducting liquidwith the application of sufficient electrical potential that exerts apulling force on the first and second substrates thereby reducing thedistance between the first substrate and the second substrate to provideactuation.

The invention itself, together with the further objects and attendantadvantages, will best be understood by reference to the followingdetailed description taken in conjunction with accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other objects, features and advantages of the presentinvention, as well as the invention itself, will be more fullyunderstood from the following description of preferred embodiments, whenread together with the accompanying drawings, in which:

FIGS. 1(A)-(B) provide schematic perspective and elevation views,respectively, of a Capillary Force Actuator consisting of two parallelsurfaces with a conducting liquid bridge. Each surface contains anelectrode covered with a dielectric layer of high permittivity.

FIGS. 2(A)-(B) provide schematic perspective and elevation views,respectively, of Capillary Force Actuator consisting of two parallelsurfaces with a conducting liquid bridge. One surface is passive and theopposing surface contains two electrodes, each covered by a dielectriclayer of high permittivity. The passive surface may have topologicalfeatures or chemical heterogeneity so as to affect the shape of thecontact line and/or its motion.

FIGS. 3(A)-(B) provide schematic perspective and elevation views,respectively, of a Capillary Force Actuator similar to that in FIG. 2,but with an alternate arrangement of electrodes. Many variations onelectrode arrangement are possible.

FIG. 4 provides a schematic of Capillary Force Actuator consisting oftwo parallel surfaces with a conducting liquid bridge. One surface ispassive and the opposing surface contains a cavity into which the liquidbridge may enter. The cavity contains electrodes, each covered by adielectric layer of high permittivity.

FIG. 5 provides a schematic of a Capillary Force Actuator consisting oftwo parallel surfaces with a conducting liquid bridge. Each surfacepossesses a cavity into which the liquid bridge may enter. The cavitycontains electrodes, each covered by a dielectric layer of highpermittivity.

FIG. 6 provides a schematic of a Capillary Force Actuator that producesrotational motion. The actuator consists of two non-parallel surfaceswith a conducting liquid bridge. One surface is passive and the opposingsurface contains two electrodes, each covered by a dielectric layer ofhigh permittivity.

FIGS. 7 (A)-(B) provide schematic illustrations of an active surfacewith “folded” dielectric layer. FIG. 7(B) represents a more detailedview of the dielectric layer.

FIG. 8(A) provides a schematic elevated top-view of a cross section ofCapillary Force Actuator along cross-section I-I of FIG. 8.

FIG. 8(B) provides a cross-sectional view of a Capillary Force Actuatorthat comprises a substrate and that includes flexible supports capableof providing an opposing force to the electrostatic and electrowettingeffects.

FIG. 8(C) provides a schematic elevated top-view of a cross section ofCapillary Force Actuator along cross-section II-II of FIG. 8.

FIG. 9 provides a cross-section of a Capillary Force/Electrostaticcombination actuator that comprises additional electrodes on thesubstrate surfaces.

FIG. 10 provides an exploded view of a concentric embodiment of theCFA/Electrostatic combination actuator.

FIG. 11 provides a schematic of a CFA/Electrostatic combination actuatorconfigured in a side-by-side arrangement.

FIG. 12 provides a schematic of a Capillary Force Actuator thatcomprises two parallel surfaces, each containing an electrode coveredwith a dielectric layer, and a flexible surface that deforms withchanging capillary pressure.

DETAILED DESCRIPTION OF THE INVENTION

A Capillary Force Actuator (CFA) consists of at least two surfaces witha conducting liquid bridge spanning the gap between them, this bridgesurrounded by an insulating non-working fluid, either liquid or gas. Atleast one of these surfaces contains one or more electrodes covered witha thin layer of solid dielectric material. The same or another surfacecontains another electrode, which may or may not be covered with adielectric material. When an electrical potential is applied across theelectrodes, the phenomenon of electrowetting occurs, especially on thedielectric-covered surface, where the contact angle of the liquid on thesurface is reduced. The decrease in contact angle on the surfacesresults in a change in the shape of the liquid bridge and hence in itscapillary pressure. A net force is then generated by both the capillarypressure acting on the surfaces and by the surface tension forces actingat the contact line, the former typically being the predominantcontributor. While electrowetting occurs in the device described hereinand the operation of the device may be explained in terms of thisphenomenon, the principle of actuation is broader than this; theprinciple of operation is that of a deformable conductor in contact withdielectric-covered surfaces, with the contact area dependent on theseparation between surfaces. According to the concept of virtual work,such a device will produce a force even when electrowetting (i.e., achange in contact angle with applied voltage) does not occur. The forcescreated by the liquid bridge may be altered and controlled byapplication of a voltage difference, either DC or AC, across theelectrodes

Several possible configurations of the actuator are described here andshown in the Figures. In its simplest form, a CFA consists of twoconducting planar solid surfaces (electrodes) parallel to one another,with at least one covered by a thin insulating solid dielectric layer,and with the gap between containing an incompressible liquid bridgesurrounded by a less-conductive non-working fluid, either liquid or gas.The liquid bridge is significantly more conducting than either thedielectric layer or the non-working fluid. A voltage difference may beapplied to the electrodes so as to apply a strong electric field to thearea of the solid dielectric layer(s) that is wetted by the bridge. Theforce that is exerted by the bridge on the electrodes is significantlyaltered by the application of this electric potential and is due tochanges in both the liquid's capillary pressure and surface tensionforces, with the first of these typically being significantly greater.

Turning now to the drawings, an embodiment of the subject inventionshown in FIGS. 1-2, contains an electrode layer 31 on at least onesubstrate 21. A solid dielectric layer 41 covers the electrode layer 31on the side of the substrate in communication with the liquid bridge 50.It may be noted an actuator could be built such that it leverages thesurface of the system in which it is incorporated. In such a scenario,the invention would take the form of a single substrate, containingelectrodes and covered with a thin insulating dielectric layer. In thisset-up, the liquid bridge would separate this substrate from thesurrounding system which would in effect provide the second substrate asillustrated in the figures. Various external systems include, but arenot limited to, the incorporation of the single-substrate embodiment inlab-on-a-chip, sensors, motors, accelerometers, valves and various otherdynamic systems known to the world of MEMS that provide a surface incommunication with the liquid bridge.

Two Parallel Surfaces: In an embodiment, shown in FIG. 1, the actuator10 consists of two bodies with parallel surfaces, each consisting of asubstrate 21 covered by electrodes 31, one or both of which are coveredby a solid, thin insulating layer 41 of high dielectric constant(“dielectric layer”). A conducting liquid bridge 50 spans between thetwo surfaces, contacting the dielectric layers, or if one electrode isnot insulated, the electrode itself. The forces created by the liquidbridge may be altered and controlled by application of a voltagedifference across the electrodes, this force acting perpendicular to theparallel surfaces.

Parallel Surfaces With One Active Surface: In an embodiment, shown inFIGS. 2 and 3, the actuator 10 consists of two bodies with parallelsurfaces with a conducting liquid bridge 50 spanning between them. Onebody consists of a substrate 21 covered by two or more electrodes 31(“active surface”), at least one of which is covered by a thindielectric layer 41. The other surface 70 does not contain an electrode(“passive surface”). The contact line 60 of the liquid bridge crossesthe surface(s) of the dielectric layer 41 and may advance across it wheneither the applied voltage or the distance between surfaces changes. Theforces created act perpendicular to the parallel surfaces. The liquidcontact line on the passive surface 70 may be pinned or its behaviormodified by surface topography or chemical heterogeneity so as toenhance performance of the device. The contact line's behavior may besimilarly affected on part, but not all, of the active surface. FIG. 2shows one example of this configuration, where the electrodes 31 arerectangular, insulated, and neighboring. FIG. 3 shows an embodimentwhere the electrodes 31 are circularly symmetric with the centralelectrode 31 not covered by a dielectric layer.

Parallel Surfaces With Additional Flexible Surface: In an embodiment,shown in FIG. 12, the actuator 10 consists of two bodies with parallelsurfaces, each consisting of a substrate 21 covered by electrodes 31,one or both of which are covered by a solid, thin insulating layer 41 ofhigh dielectric constant (“dielectric layer”). A conducting liquidbridge 50 spans between the two surfaces, contacting the dielectriclayers, or if one electrode is not insulated, the electrode itself. Theconducting liquid bridge also contacts a flexible surface 42. Theflexible surface may be, but is not limited to, a plate, diaphragm, ormembrane. The pressure created by the liquid bridge acting on theflexible surface may be altered and controlled by application of avoltage difference across the electrodes. The pressure acts to causedeformation of the flexible surface. Such an embodiment may beparticularly useful in valves and pumps for lab-on-a-chip applications.

Parallel Surfaces With Active Surfaces In A Cavity: In the embodimentsshown in FIGS. 4 and 5, the actuator 10 consists of two bodies withparallel surfaces, one or both of which contain a cavity 80 into whichthe liquid bridge 50 enters (as illustrated by the arrows F1 in FIG. 4).The interior surfaces of the cavity contain electrodes 31 of bothpolarities, some or all of which are covered with a thin dielectriclayer 41. The contact line of the liquid 60 crosses these surface(s) ofthe dielectric-covered electrode(s) and may advance across it. Certaininterior surfaces 91 of the cavity are lyophillic so that the liquidbridge does not entirely evacuate the cavity when no voltage is appliedand the remainder of the interior surfaces 92 are lyophobic so that theforce may be controlled via the application of voltage to theelectrodes. For the purposes of the present disclosure, the term“lyophillic” refers to a surface that is preferentially wetted by theliquid employed in the capillary bridge in comparison to the non-workingfluid; that is, the contact angle with such a surface is less than90-degrees. In addition, the term “lyopobic” refers to a surface that ispreferentially avoided by the liquid employed in the capillary bridge incomparison to the non-working fluid; that is, the contact angle withsuch a surface is greater than 90-degrees. The exterior surfacessurrounding the cavity 120 may also be lyophobic so as to prevent thebridge from spreading onto them. Cavities may have ports 101 at thecavity's periphery so as to allow the nonworking fluid (typically air)to enter/leave the cavity as the liquid bridge moves out/into thecavity. FIG. 4 shows an embodiment where one surface 70 is passive(without electrode and cavity) and the liquid bridge 50 and cavity 80 onthe other body are circularly symmetric. The contact line of the bridgeon the passive surface 60 may be pinned (as shown in the Figure) or thecontact line's behavior may be modified by surface topography orchemical heterogeneity so as to enhance performance. Ports 101 areincluded at the periphery of the cavity. The forces generated by theliquid bridge act perpendicular to the parallel surfaces 70,21. FIG. 5shows an embodiment where circularly symmetric cavities 80 are withinboth bodies and the liquid bridge wets into each cavity. The generatedforces act perpendicular to the exterior surfaces 120.

Rotating Surface: In an embodiment shown in FIG. 6, the forces generatedby the liquid bridge act to rotate one body with respect to another. Onesubstrate 21 is attached by a flexure 111 to another stationary body 22so that it may rotate in response to a changing capillary force inducedby applied voltage. Electrodes 31 are within the stationary body 22 andare covered by a thin dielectric layer 41. The rotating body 21 in thisconfiguration is without electrodes (“passive”). The liquid contact line60 on the passive surface may be pinned or its behavior modified bysurface topography or chemical heterogeneity so as to enhanceperformance of the device. A liquid bridge 50 of conducting fluid isbetween the surfaces of the two bodies, perhaps filling the intersticeof their connection. The contact line of the liquid bridge 60 crossesthe surface(s) of the dielectric layer and may advance on it. The forcescreated act to cause rotation. In other configurations of this device,the rotating and stationary surfaces may be connected by a hinge, andboth the rotating and stationary surfaces may contain electrodes, someor all of which are covered with a thin dielectric layer.

Capillary Force Actuation in Combination with Electrostatic Actuation:Certain MEMS applications require both significant stroke and a verylarge force capability (greater than 100 μN) near one or both ends ofstroke. One example is RF MEMS switches where metal-to-metal contactforces in the switch-closed position must be large enough to ensure agood electrical connection is achieved. Another example is microfluidicvalves for lab-on-a-chip applications, which must be closed tightly toprevent leakage.

For very small gaps (less than 0.5 μm), electrostatic actuators canprovide superior force capability to capillary force actuation withoutemploying excessive voltages. However, electrostatic is incapable oflarge actuation stroke with low voltage. The use of capillary forceactuation in combination with electrostatic actuation allows bothsignificant stroke and very large force near the end of stroke to beachieved.

Many configurations of this combination of actuators are possible. Ingeneral, they consist (1) a capillary force actuator (as previouslydiscussed in multiple embodiments including but not limited to anembodiment consisting of two surfaces, with electrodes and dielectriclayers arranged upon them, and a conducting capillary bridge); and (2)additional electrodes arranged on both surfaces that may be brought intoclose proximity of each other. The additional electrodes may or may notbe in electrical communication with the electrodes of the capillaryforce actuator and may or may not be a continuation of them. Theadditional electrodes may also be covered with a thin dielectric layerto prevent current flow in an embodiment where the two surfaces arebrought into physical contact. FIG. 9 shows a cross section of anembodiment of this device. In this embodiment, the combination actuator11 contains an additional electrode 37 on each of the substrates 21,28.These additional electrodes 37 are position so that they are not incommunication with the conducting liquid 50. This embodiment iscircularly symmetric, meaning the electrodes 37 shown in this crosssection are in the shape of an annulus. FIG. 10 shows an exploded viewof a similar embodiment of the combination actuator 11 where the singlesubstrate 28 from FIG. 9 is instead made up of a single substrate 26 incommunication with a annular-shaped substrate 27. FIG. 11 shows anembodiment of a combination actuator 11 where the capillary forceactuator and electrostatic actuators are side-by-side between thesubstrate layers 29,21 as would be preferred in an RF switch.

Although not illustrated, it should be appreciated that in addition tobeing disposed on the first and second substrates, the additionalelectrodes can be positioned in close proximity (in a proximity ordistance that is desired or required) to the first and secondsubstrates. In this configuration, the electrostatic actuator worksalongside or around or remotely to the Capillary Force Actuator toachieve the desired results. In one embodiment that is useful forlab-on-a-chip devices, a Capillary Force Actuator may be used as a meansto open a valve, while a surrounding electrostatic actuator could beleveraged to close the valve with greater force than would otherwise bepossible with the Capillary Force Actuator alone. Electrostaticactuators are well known in the prior art, and the range of embodimentsthat are currently employed in MEMS, and other utilities can beleveraged in combination with the Capillary Force Actuator in numerousconfigurations to achieve the superior force creation when gaps aresmall and the large stroke distances reduced voltage and increased forcewhen the gap distance increases. For instance, but not limited thereto,the capillary force actuator may further comprise additional electrodesand/or metal layers disposed on: the first substrate and the secondsubstrate, and/or a third substrate in close proximity to the firstsubstrate and the second substrate. And whereby the additionalelectrodes and/or metal layers are not in communication with theconducting liquid, and the additional electrodes and/or metal layers arepositioned opposite each other on: the first substrate and the secondsubstrate, and/or the third substrate.

Flexible Supports: In an embodiment of the present invention, theactuator 10, 11 can include flexible supports to provide stability,limit the range of motion, adjust or influence the location orresistance of any of the substrates and associated components herein.The use of flexible supports is customary in the world of MEMS and theinventor fully anticipates that such support mechanism would be used inconjunction with this invention. Embodiments of the current inventionmay include, but are not limited to, simple, double or other flexures,cantilever beams, diaphragms, membranes, serpentine springs, leafsprings, hinges, plates, pivots, complaint joints, rotational joints,torsional hinges, folded beams, revolute joints, or translational jointsfor flexible supports. FIG. 8 illustrates a micromachined siliconactuator 10 and serves as an illustrative example of the use of flexiblesupports 181 in conjunction with the substrates of the actuator 10.

Capillary Force Actuator: An exemplary novelty of the Capillary ForceActuator (CFA) comes from, but is not limited thereto, the use of aconducting liquid bridge that partially covers a dielectric-coveredelectrode(s) attached to one or more surfaces, this liquid bridge actingas a deformable conductive element in the circuit, and, as such,generating force in a novel and advantageous fashion in comparison toelectrostatic actuators.

The generation of forces upon the surfaces may be understood via theprinciple of virtual work. A virtual displacement of one surface towardthe other(s) would result in spreading of the bridge onto a largersurface area of the dielectric. The conductance of the liquid results ina large electrical potential being put across the dielectric layer thatis wetted, this potential being a substantial fraction of the voltageapplied to the device. The energy change associated with a newly wettedarea of dielectric is effectively negative due to the electrical workdone upon the charge source when the voltage is maintained constantacross the dielectric layer. Hence, a virtual displacement of onesurface toward the other results in a decrease in total energy of thedevice and its charge source. The principle of virtual work implies thatan attractive force is generated between the surfaces via theapplication of the electrical potential. This attractive force acts inaddition to any surface tension and capillary forces that act betweenthe surfaces when no voltage is applied. In essence, the liquid bridgeacts as a deformable conductor (or electrode) in this device. Thephenomenon of electrowetting naturally occurs in this device and theforces obtained may also be understood within the paradigm of activelychanging contact angle via electrowetting. Nevertheless, according tothe argument of virtual work presented, forces would be produced withinan actuator of similar construction even if electrowetting did not occur(that is, even if the deformable conductor did not need to obey theequation of capillarity, —for example, if it consisted of an elasticconducting solid that would deform onto the dielectric-covered electrodeunder a virtual displacement of one surface).

This principle of operation of CFA is analogous to how attractive forcesare generated in conventional electrostatic actuators where a virtualdisplacement of one electrode toward another results in a decrease inoverall energy. In that case, however, it is achieved through a decreasein the thickness of the dielectric (air), while in the case of thepresent invention, it is achieved through an increase in the effectivearea of the dielectric layer. Therefore, in CFA, the thickness of thedielectric used is independent of the distance between the surfaces,unlike in parallel plate electrostatic actuators. Hence, the dielectricthickness may be made very small in capillary force actuators withoutaffecting device stroke, increasing the force produced at a givenapplied voltage and thus attaining much larger forces and strokes thanpossible with electrostatic actuators. Furthermore, the dielectric layerin CFA can have a much higher dielectric constant than air, alsoincreasing the amount of force that may be achieved with a givenvoltage.

It should be appreciated that a wide variety of materials may beutilized to construct the present invention. For example, the dielectriclayer may be chosen so as to have high dielectric constant. In oneembodiment, the actuator may be constructed with a dielectric layer witha constant 30 times that of air. The layer might be manufactured as thinas practically realizable, preferably less than 500 nm, whilemaintaining its high resistance and avoiding dielectric breakdown. Inanother embodiment of the present invention, barium strontium titanate(BST) with a relative dielectric constant of 180 may be deposited on asilicon wafer (covered first with titanium and platinum) with submicronthickness via metal-organic chemical vapor deposition. An alternativeembodiment for soft polymeric devices could be a composite of bariumtitanate nanoparticles mixed into a polymer precursor and cured to forma polymer matrix composite. Suitable polymers for such devices would bepolyurethanes and poly-dimethylsiloxane (PDMS). In this case, micronthickness layers may be achieved via spin coating, molding, or castingknife treatment, followed by curing.

In another embodiment of the present invention, the liquid of thecapillary bridge can be chosen to have a significantly higherconductivity than the dielectric layer so that the voltage differenceacross the dielectric layer is as high as possible. Furthermore, theliquid may have a large interfacial surface tension (greater than 45mN/m) with the non-working fluid (typically a gas, such as air) so as toincrease the force capability of the device. The liquid may be chosensuch that it does not penetrate, swell, or otherwise react with theelectrode, dielectric, or other surfaces. The liquid may also be chosensuch that it will not evaporate during device use. Various embodimentsinclude, but are not limited to, the use of mercury, methylene diiodide,formamide, gallium-indium-tin alloy, and water for the liquid bridge.

In another embodiment, the wetting surfaces of the device are lyophobicto the liquid used when no voltage is applied. This allows a substantialchange in contact angle and, hence, a substantial change in thecapillary force applied. Furthermore, lyophobicity allows the actuatorto apply both repulsive and attractive forces dependent on the appliedvoltage. If the dielectric layer used is lyophilic, a very thin (i.e.,several nanometers) coating of lyophobic material, such as the polymerspoly-tetrafluoroethelyne (PTFE) or poly-dimethylsiloxane (PDMS), may beused, with PTFE being the optimal choice. Better functioning of thedevice is generally obtained when there is little contact anglehysteresis on the surface and such coatings may be useful in this regardalso. Appropriate microscale surface texturing is useful in decreasingcontact angle hysteresis and rendering the surface super-lyophobic [Chen1999]. Such surface texturing may be achieved via molding or roughening.

In another embodiment, the diameter of the liquid bridge may besignificantly greater than the distance it spans (a factor of 10 to 50)between the two surfaces. When a cavity is employed, a lower value ofthis ratio may be used, greater than 3 is recommended.

As stated, the force generation capability of the device may beunderstood from the principle of virtual work. This viewpoint dictatesthat it is desirable to enhance the increase in wetted dielectricsurface with a displacement of one surface toward the other. Toward thisend, an embodiment of the current invention includes cavities in thesurface(s) into which the liquid bridge will wet with displacement ofthe surfaces. This geometry is shown in FIGS. 4 and 5, and discussedabove. Another means to achieve this enhancement is to increase thedielectric layer area per unit wetted area by manufacturing thedielectric layer to have a special “folded” geometry. An embodiment ofthe invention might also mimic the geometry of the electrostatic combactuators and is shown in FIG. 7. In this case, microscale fins 151,analogous to comb teeth, project from the electrodes and are coated witha thin layer of material with high dielectric constant 41. Embeddedwithin this material are conducting “fingers” 161 that may be exposed tothe liquid bridge 50 at one end and are interdigitated with the fins butseparated from them and from each other by the dielectric material.These fingers do not touch one another. As the liquid bridge contactline 60 advances over a surface of this construction, it contacts thesefingers (or a very thin layer upon them) and brings an area ofdielectric gap between the fingers and fins into the circuit, this areaof dielectric exposed to the potential difference being significantlygreater than increase in wetted area. Hence, the force produced would besignificantly greater under the same applied voltage than that achievedwith the conventional design of a planar dielectric layer. Manygeometric arrangements of electrode fins and fingers are possible. Forexample, a cavity may be used with its electrodes having a “folded”dielectric layer, greatly improving the force-voltage characteristic ofthe device.

Various embodiments of the invention and its parts may be manufacturedby several different methods depending on the ultimate application andtypes of materials desired. For application in conventional siliconMEMS, industry-standard lithographic fabrication may be employed. Anembodiment of this kind is illustrated in FIG. 8B which combines amicromachined silicon component (FIG. 8C) with micromachined glass (FIG.8A) to form the actuator. This particular embodiment contains concentricelectrodes 31 to form one active surface 21, opposite a passivedielectric-surface 70 held by flexible supports 181 and connected to abase 71. For application in Bio-MEMS, lithographic fabrication may becombined with micromolding of polymeric structures and assembly.

The invention and the embodiments described above provide a number ofsignificant advantages over the prior art. This principle of operationof CFA is analogous to how attractive forces are generated inconventional parallel plate electrostatic actuators where a virtualdisplacement of one electrode toward another results in a decrease inoverall energy. In that case, however, it is achieved through a decreasein the thickness of the dielectric (air), while in the case of thepresent invention, it is achieved through an increase in the effectivearea of the dielectric layer. Therefore, in CFA, the thickness of thedielectric used is independent of the distance between the surfaces,unlike in parallel plate electrostatic actuators. Hence, the dielectricthickness may be made very small in capillary force actuators withoutaffecting device stroke, increasing the force produced at a givenapplied voltage and thus attaining much larger forces than possible withelectrostatic actuators. Furthermore, the dielectric layer in CFA canhave a much higher dielectric constant than air, also increasing theamount of force that may be achieved with a given voltage.

The capillary force actuator has several significant advantages incomparison to other technologies: The force capability is much greater(10-100 times) than that of a similarly sized electrostatic actuatorwhen voltage levels used are restricted to those commonly employed inintegrated circuits; The total movement allowable is greater than thattypically achieved with electrostatic or piezoelectric actuatorsemployed in MEMS; Out-of-plane forces can be easily achieved. Manyoptical and microfluidic applications require forces normal to thedevice plane, however, this is difficult to achieve with electrostaticactuators that have significant force capability; and no mechanical wearoccurs unlike in some MEMS actuation technologies, such as scratchactuators.

Of course, it should be understood that a wide range of changes andmodifications could be made to the preferred embodiments describedabove. It is therefore intended that the foregoing detailed descriptionbe considered in all respects illustrative rather than limiting theinvention described herein. The scope of the invention is thus indicatedby the following claims, including all equivalents.

References

The devices, systems and methods of various embodiments of the inventiondisclosed herein may utilize aspects disclosed in the followingreferences and patents and which are hereby incorporated by referenceherein in their entirety:

Patents:

6,152,181 November 2000 Phillip G. Wapner, et al. 137/807 6,565,727 May2003 Alexander D. Shenderov 204/600 6,545,815 April 2003 Timofei N.Kroupenkine, et al. 359/665 5,472,577 December 1995 Marc D. Porter, etal. 204/111 6,911,132 June 2005 Vamsee K. Pamula, et al. 204/6006,458,256 October 2002 Chuan-Jian Zhong 204/242 6,629,826 October 2003Euisik Yoon, et al. 417/393 6,989,234 January 2006 Pramod Kolar, et al.435/6 6,133,670 October 2000 M. Steven Rodgers, et al. 310/309Other:

[Moon 2002] H. Moon, S. K. Cho, R. Garrell, C.-J. Kim, “Low VoltageElectrowetting-On-Dielectric,” Journal of Applied Physics, Vol. 92, No.7, October 2002, pp. 4080-4087.

[Jackel 1983] J. L. Jackel, S. Hackwood, J. J. Veselka, and G. Beni,“Electrowetting Switch for Multimode Optical Fibers,” Applied Optics,Vol. 22, No. 11, June 1983, pp. 1765-1770.

[Shapiro 2003] B. Shapiro, H. Moon, R. Garrell, C.-J. Kim, “EquilibriumBehavior of Sessile Drops under Surface Tension, Applied ExternalFields, and Material Variations,” Journal of Applied Physics, Vol. 93,No. 9, May 2003, pp 5794-5811.

[Pollack 2002] M. G. Pollack, A. D. Shenderov, and R. B. Fair,“Electrowetting-based Actuation of Droplets for IntegratedMicrofluidics,” Lab on a Chip, Vol. 2, 2002, pp. 96-101.

[Chen 1999] W. Chen, A. Fadeev, M. Hsieh, D. Oner, J. Youngblood, and T.McCarthy, “Ultrahydrophobic and Ultralyophobic Surfaces: Some Commentsand Examples,” Langmuir, Vol. 15, 1999, pp. 3395-3399.

[Wan 2006] Z. Wan, “Surface Tension Modulation for Actuation ofMicrodevices,” http://www.ece.uic.edu/˜zlwan/research.htm

[TI 2006] “DLP Technology,”http://www.dlp.com/dlp_technology/default.asp

In summary, while the present invention has been described with respectto specific embodiments, many modifications, variations, alterations,substitutions, and equivalents will be apparent to those skilled in theart. The present invention is not to be limited in scope by the specificembodiment described herein. Indeed, various modifications of thepresent invention, in addition to those described herein, will beapparent to those of skill in the art from the foregoing description andaccompanying drawings. Accordingly, the invention is to be considered aslimited only by the spirit and scope of the following claims, includingall modifications and equivalents.

Still other embodiments will become readily apparent to those skilled inthis art from reading the above-recited detailed description anddrawings of certain exemplary embodiments. It should be understood thatnumerous variations, modifications, and additional embodiments arepossible, and accordingly, all such variations, modifications, andembodiments are to be regarded as being within the spirit and scope ofthis application. For example, regardless of the content of any portion(e.g., title, field, background, summary, abstract, drawing figure,etc.) of this application, unless clearly specified to the contrary,there is no requirement for the inclusion in any claim herein or of anyapplication claiming priority hereto of any particular described orillustrated activity or element, any particular sequence of suchactivities, or any particular interrelationship of such elements.Moreover, any activity can be repeated, any activity can be performed bymultiple entities, and/or any element can be duplicated. Further, anyactivity or element can be excluded, the sequence of activities canvary, and/or the interrelationship of elements can vary. Unless clearlyspecified to the contrary, there is no requirement for any particulardescribed or illustrated activity or element, any particular sequence orsuch activities, any particular size, speed, material, dimension orfrequency, or any particularly interrelationship of such elements.Accordingly, the descriptions and drawings are to be regarded asillustrative in nature, and not as restrictive. Moreover, when anynumber or range is described herein, unless clearly stated otherwise,that number or range is approximate. When any range is described herein,unless clearly stated otherwise, that range includes all values thereinand all sub ranges therein. Any information in any material (e.g., aUnited States/foreign patent, United States/foreign patent application,book, article, etc.) that has been incorporated by reference herein, isonly incorporated by reference to the extent that no conflict existsbetween such information and the other statements and drawings set forthherein. In the event of such conflict, including a conflict that wouldrender invalid any claim herein or seeking priority hereto, then anysuch conflicting information in such incorporated by reference materialis specifically not incorporated by reference herein.

1. A capillary force-actuator, comprising: a first substrate; anelectrode layer disposed on said first substrate; a dielectric layerdisposed on said electrode layer on the side farthest from said firstsubstrate; and a conducting liquid in communication with said dielectriclayer, whereby the capillary pressure within said liquid is reduced bythe application of an electric potential and is below ambient pressurewith the application of sufficient electrical potential thereby exertinga pulling force on said first substrate when the actuator is incommunication with a surface of a system.
 2. The actuator of claim 1,further comprising: a flexible support in communication with said firstsubstrate, whereby said flexible support provides at least oneadditional force.
 3. The actuator of claim 2, wherein said at least oneadditional force can act in any direction on said first substrate. 4.The actuator of claim 2, wherein said at least one additional force canact in a direction that opposes or corresponds with said pulling force.5. The actuator of claim 2, wherein said flexible support comprises atleast one of the following: simple, double or other flexures, cantileverbeams, diaphragms, membranes, serpentine springs, leaf springs, hinges,plates, pivots, complaint joints, rotational joints, torsional hinges,folded beams, revolute joints, or translational joints.
 6. The actuatorof claim 1, wherein the ambient environment of said conducting liquid isa less-conductive non-working fluid than said conducting liquid.
 7. Theactuator of claim 1, wherein the said ambient pressure comprisesatmospheric pressure.
 8. The actuator of claim 1, wherein said systemcomprises a MEMS.
 9. The actuator of claim 1, wherein said systemcomprises a valve, a switch, a sensor, a pump, an optical device or anyequivalents thereof.
 10. A capillary force-actuator, comprising: a firstsubstrate; an electrode layer disposed on said first substrate; adielectric layer disposed on said electrode layer on the side farthestfrom said first substrate; a second substrate; and a conducting liquidin communication with said dielectric layer of said first substrate andsaid second substrate, whereby the capillary pressure within said liquidis reduced by the application of an electric potential and is belowambient pressure with the application of sufficient electrical potentialthereby exerting a pulling force on said first and second substrates.11. The actuator of claim 10, further comprising: a flexible support incommunication with at least one of said substrates, whereby saidflexible support provides at least one additional force to said firstsubstrate or said second substrate or both said first substrate and saidsecond substrate.
 12. The actuator of claim 11, wherein said at leastone additional force can act in any direction on said first or secondsubstrates.
 13. The actuator of claim 11, wherein said at least oneadditional force can act in a direction that opposes or corresponds withsaid pulling force.
 14. The actuator of claim 11, wherein said flexiblesupport comprises at least one of the following: simple, double or otherflexures, cantilever beams, diaphragms, membranes, serpentine springs,leaf springs, hinges, plates, pivots, complaint joints, rotationaljoints, torsional hinges, folded beams, revolute joints, ortranslational joints.
 15. The actuator of claim 10, wherein the ambientenvironment of said conducting liquid is a less-conductive non-workingfluid than said conducting liquid.
 16. The actuator of claim 10, whereinthe said ambient pressure comprises atmospheric pressure.
 17. Theactuator of claim 11, wherein the ambient environment of said conductingliquid is a less-conductive non-working fluid than said conductingliquid.
 18. The actuator of claim 17, wherein said substrates arearranged in a parallel fashion.
 19. The actuator of claim 17, whereinsaid substrates are arranged in a hinge-like non-parallel fashion, andwherein multiple electrodes are contained within the said electrodelayer, whereby the change in capillary force results in a rotationalforce on said first and second substrates.
 20. The actuator of claim 10,further comprising: an electrode layer disposed on said second substrateon side of substrate nearest to said conducting liquid; and a dielectriclayer disposed between said electrode layer on side of said electrodelayer nearest to said conducting liquid.
 21. The actuator of claim 20,further comprising: a flexible support in communication with at leastone of said substrates, whereby said flexible support provides at leastone additional force to said first substrate or said second substrate orboth said first substrate and said second substrate.
 22. The actuator ofclaim 21, wherein said at least one additional force can act in anydirection on said first or second substrates.
 23. The actuator of claim21, wherein said at least one additional force can act in a directionthat opposes or corresponds with said pulling force.
 24. The actuator ofclaim 21, wherein said flexible support comprises at least one of thefollowing: simple, double or other flexures, cantilever beams,diaphragms, membranes, serpentine springs, leaf springs, hinges, plates,pivots, complaint joints, rotational joints, torsional hinges, foldedbeams, revolute joints, or translational joints.
 25. The actuator ofclaim 20, wherein the ambient environment of said conducting liquid is aless-conductive non-working fluid than said conducting liquid.
 26. Theactuator of claim 20, wherein the said ambient pressure comprisesatmospheric pressure.
 27. The actuator of claim 21, wherein the ambientenvironment of said conducting liquid is a less-conductive non-workingfluid than said conducting liquid.
 28. The actuator of claim 27, whereinsaid substrates are arranged in a parallel fashion.
 29. The actuator ofclaim 27, wherein said substrates are arranged in a hinge-likenon-parallel fashion, and wherein multiple electrodes are containedwithin the said electrode layer, whereby the change in capillary forceresults in rotational motion of one or both of said substrates.
 30. Theactuator of claim 10, further comprising: an electrode layer disposed onsaid second substrate on side of substrate nearest to said conductingliquid.
 31. The actuator of claim 30, further comprising: a flexiblesupport in communication with at least one of said substrates, wherebysaid flexible support provides at least one additional force to saidfirst substrate or said second substrate or both said first substrateand said second substrate.
 32. The actuator of claim 31, wherein said atleast one additional force can act in any direction on said first orsecond substrates.
 33. The actuator of claim 31, wherein said at leastone additional force can act in a direction that opposes or correspondswith said pulling force.
 34. The actuator of claim 31, wherein saidflexible support comprises at least one of the following: simple, doubleor other flexures, cantilever beams, diaphragms, membranes, serpentinesprings, leaf springs, hinges, plates, pivots, complaint joints,rotational joints, torsional hinges, folded beams, revolute joints, ortranslational joints.
 35. The actuator of claim 30, wherein the ambientenvironment of said conducting liquid is a less-conductive non-workingfluid than said conducting liquid.
 36. The actuator of claim 30, whereinthe said ambient pressure comprises atmospheric pressure.
 37. Theactuator of claim 31, wherein the ambient environment of said conductingliquid is a less-conductive non-working fluid than said conductingliquid.
 38. The actuator of claim 37 where said substrates are arrangedin a parallel fashion.
 39. The actuator of claim 37, wherein saidsubstrates are arranged in a hinge-like non-parallel fashion, andwherein multiple electrodes are contained within the said electrodelayer, whereby the change in capillary force results in rotationalmotion of one or both of said substrates.
 40. The actuator of claim 10,wherein at least one of said surfaces contains a cavity into which saidliquid bridge may enter; and whereby said electrode layer is distributedover the surface area of said cavity, and covered by said dielectriclayer.
 41. The actuator of claim 15, wherein at least one of saidsurfaces contains a cavity into which said liquid bridge may enter,whereby said electrode layer is distributed over the surface area ofsaid cavity and covered by said dielectric layer.
 42. The actuator ofclaim 17, wherein at least one of said surfaces contains a cavity intowhich said liquid bridge may enter, whereby said electrode layer isdistributed over the surface area of said cavity and covered by saiddielectric layer.
 43. The actuator of claim 20, wherein at least one ofsaid surfaces covered by the dielectric layer contains a cavity intowhich said liquid bridge may enter; whereby said electrode layer isdistributed over the surface area of said cavity and covered by saiddielectric layer.
 44. The actuator of claim 25, wherein at least one ofsaid surfaces covered by the dielectric layer contains a cavity intowhich said liquid bridge may enter; whereby said electrode layer isdistributed over the surface area of said cavity and covered by saiddielectric layer of high permittivity.
 45. The actuator of claim 27,wherein at least one of said surfaces covered by the dielectric layercontains a cavity into which said liquid bridge may enter; whereby saidelectrode layer is distributed over the surface area of said cavity andcovered by said dielectric layer of high permittivity.
 46. The actuatorof claim 30, wherein at least one of said surfaces covered by thedielectric layer contains a cavity into which said liquid bridge mayenter; whereby said electrode layer is distributed over the surface areaof said cavity and covered by said dielectric layer.
 47. The actuator ofclaim 35, wherein at least one of said surfaces covered by thedielectric layer contains a cavity into which said liquid bridge mayenter; whereby said electrode layer is distributed over the surface areaof said cavity and covered by said dielectric layer of highpermittivity.
 48. The actuator of claim 37, wherein at least one of saidsurfaces covered by the dielectric layer contains a cavity into whichsaid liquid bridge may enter; whereby said electrode layer isdistributed over the surface area of said cavity and covered by saiddielectric layer of high permittivity.
 49. The actuator of claim 10,wherein said second substrate comprises topological features.
 50. Theactuator of claim 15, wherein said second substrate comprisestopological features.
 51. The actuator of claim 17, where said secondsubstrate comprises topological features.
 52. The actuator of claim 20,wherein said second substrate comprises topological features.
 53. Theactuator of claim 25, wherein said second substrate comprisestopological features.
 54. The actuator of claim 27, wherein said secondsubstrate comprises topological features.
 55. The actuator of claim 30,wherein said second substrate comprises topological features.
 56. Theactuator of claim 35, wherein said second substrate comprisestopological features.
 57. The actuator of claim 37, wherein said secondsubstrate face comprises topological features.
 58. The actuator of claim10, wherein said second substrate comprises chemical heterogeneity. 59.The actuator of claim 15, wherein said second substrate compriseschemical heterogeneity.
 60. The actuator of claim 17, wherein saidsecond substrate comprises chemical heterogeneity.
 61. The actuator ofclaim 20, wherein said second substrate comprises chemicalheterogeneity.
 62. The actuator of claim 25, wherein said secondsubstrate comprises chemical heterogeneity.
 63. The actuator of claim27, wherein said second substrate comprises chemical heterogeneity. 64.The actuator of claim 30, wherein said second substrate compriseschemical heterogeneity.
 65. The actuator of claim 35, wherein saidsecond substrate comprises chemical heterogeneity.
 66. The actuator ofclaim 37, wherein said second substrate comprises chemicalheterogeneity.
 67. A method of force actuating, said method comprising:providing a said first substrate; providing an electrode layer disposedon said first substrate; providing a dielectric layer disposed on saidelectrode layer on the side farthest from said first substrate;providing a conducting liquid in communication with said dielectriclayer of said first substrate; integrating said first substrate and saidconducting liquid into a system, wherein said conducting liquid is incommunication with the surface of said system; and applying an electricpotential to reduce the capillary pressure within said conducting liquidwith the application of sufficient electrical potential that exerts apulling force on said first substrate thereby reducing the distancebetween said first substrate and said surface of said system.
 68. Themethod of claim 67, further comprising: providing a flexible support incommunication with said substrate.
 69. The method of claim 68, whereinsaid at least one additional force can act in any direction on saidfirst substrate.
 70. The method of claim 68, wherein said at least oneadditional force can act in a direction that opposes or corresponds withsaid pulling force.
 71. The method of claim 67, wherein said systemcomprises a MEMS.
 72. The method of claim 67, wherein said systemcomprises a valve, a switch, a sensor, a pump, an optical device or anyequivalents thereof.
 73. A method of force actuating, said methodcomprising: providing a said first substrate; providing an electrodelayer disposed on said first substrate; providing a dielectric layerdisposed on said electrode layer on the side farthest from said firstsubstrate; providing a second substrate; providing a conducting liquidin communication with said dielectric layer of said first substrate andsaid second substrate; and applying an electric potential to reduce thecapillary pressure within said conducting liquid with the application ofsufficient electrical potential that exerts a pulling force on saidfirst and second substrates thereby reducing the distance between saidfirst substrate and said second substrate to provide actuation.
 74. Themethod of claim 73, further comprising: providing a flexible support incommunication with at least one of said substrates.
 75. The method ofclaim 73, wherein said at least one additional force can act in anydirection on said first or second substrates.
 76. The method of claim74, wherein said at least one additional force can act in a directionthat opposes or corresponds with said pulling force.
 77. The method ofclaim 73, further comprising: providing additional electrodes and/ormetal layers on said first and said second substrate such that saidadditional electrodes and/or metal layers are not in communication withsaid conducting liquid.
 78. A method of capillary actuating, said methodcomprising: providing a said first substrate; providing an electrodelayer disposed on said first substrate; providing a dielectric layerdisposed on said electrode layer on the side farthest from said firstsubstrate; providing a second substrate; providing an electrode layerdisposed on said second substrate; providing a dielectric layer disposedon said electrode layer on the side farthest from said second substrate;providing a conducting liquid in communication with said dielectriclayer of said first substrate and said dielectric layer of said secondsubstrate; and applying an electric potential to reduce the capillarypressure within said conducting liquid with the application ofsufficient electrical potential that exerts a pulling force on saidfirst and second substrates thereby reducing the distance between saidfirst substrate and said second substrate to provide actuation.
 79. Themethod of claim 78, further comprising: providing a flexible support incommunication with at least one of said substrates.
 80. The method ofclaim 79, wherein said at least one additional force can act in anydirection on said first or second substrates.
 81. The method of claim79, wherein said at least one additional force can act in a directionthat opposes or corresponds with said pulling force.
 82. The method ofclaim 78, further comprising: providing additional electrodes and/ormetal layers on both said first and said second substrate such that saidadditional electrodes and/or metal layers are not in communication withsaid conducting liquid.